| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which has superior maintainability, and to provide a substrate temperature adjusting and fixing device having the electrostatic chuck. SOLUTION: The electrostatic chuck has a base in which an electrostatic electrode is incorporated, and attracts and holds the object to be attracted by applying a voltage to the electrostatic electrode, wherein a mount portion constituted including a dielectric is mounted on an upper surface of the base in a detachable state and the object to be attracted is mounted on an upper surface of the mount portion. COPYRIGHT: (C)2010,JPO&INPIT |
