| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum apparatus which can shorten a tact time and increase a production quantity. SOLUTION: This vacuum apparatus has an evacuatable chamber 1, and first and second susceptors 11 and 21 which are movably installed in the chamber 1. A treatment chamber 4 is defined by partitioning a part directly under a region formed by one part of the upper part of the chamber 1 with either of the first and second susceptors 11 and 21, and a load lock chamber 7 is defined by partitioning a part directly under a region formed by the other part of the upper part of the chamber 1 with the other one of the first and second susceptors 11 and 21. Either of the first and second susceptors 11 and 21 is transported from a load lock chamber 7 side to a treatment chamber 4 side and the other one of the first and second susceptors 11 and 21 is complementarily transported from the treatment chamber 4 side to the load lock chamber 7 side. Thereby, substrates to be treated 10a to 10c and 20a to 20c mounted on the first and second susceptors 11 and 21 are sequentially treated in the treatment chamber 4. COPYRIGHT: (C)2010,JPO&INPIT |
