MOUNT TABLE CONVEYING DEVICE, AND CONVEYANCE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mount table conveyance technique without causing any galling in a guide rail even when a mount table is operated at a high speed with high acceleration. SOLUTION: The mount table conveying device conveys the mount table 40 where a substrate 7 is mounted on first and second guide rails 11 and 12 by supporting and driving it by a linear motor. In this cases, The mount table conveying device includes a restriction air bearing 23 which energizes the first guide rail 11 in a lateral direction orthogonal to the moving direction of the mount table 40 to guide the mount table 40 in a restricted state, and a cushion air bearing 24 which energizes the first guide rail 11 in the lateral direction orthogonal to the moving direction of the mount table 40 to guide the mount table 40 in an elastically cushioned state. COPYRIGHT: (C)2010,JPO&INPIT