| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for floating a substrate which has a stage adapted to function as a substrate floating table for floating a processing object substrate in the air using a force of pneumatic pressure and which allows improving a consumption efficiency of power usage (compressed air) to float the substrate. SOLUTION: The substrate floating device is provided a multitude of jetting ports 120 on the top surface of a stage 112. For each of the jetting ports 120, there is provided a jet control section 144 within the stage 112 in a configuration of a flow-rate switching valve, in which the jet control section 144 performs port-by-port and automatic switching of a flow rate of air jet depending on a relative position with respect to the substrate G. The jet control section 144 has a valve chest 146 with a spherically formed wall surface and a spherical valving element 148 movably provided within the valve chest 146. In top and bottom portions of the valve chest 146, there are formed an outlet 146a and an inlet 146b, respectively, positioned oppositely to each other in a vertical direction. COPYRIGHT: (C)2010,JPO&INPIT |
