| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a magnetic head for uniformizing the height of a side shield composed of a main magnetic pole and a soft magnetic film. Ž<P>SOLUTION: The method includes the steps for: forming a plating seed film 21 on a substrate; patterning a first magnetic film; forming a non-magnetic film 24 on the substrate having the first magnetic film; forming a stopper film 26 acting as a stopper during polishing on the substrate with the non-magnetic film 24 formed thereon; leaving the stopper film 26 on a portion of the non-magnetic film 24; eliminating a portion of the non-magnetic film 24 around the first magnetic film to form a groove 22a with the plating seed film 21 exposing; forming a second magnetic film on the groove 22a; and polishing the surface of the substrate to the stopper film 26. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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