发明名称 SUPERCONDUCTING WIRING STRUCTURE
摘要 <P>PROBLEM TO BE SOLVED: To provide superconducting wiring which has small high-frequency loss, and small electric charge noise and magnetic noise by suppressing formation of a surface oxide film having many defect levels on a surface of the superconducting wiring. Ž<P>SOLUTION: A superconducting wiring layer is coated with a normally conductive metal layer made of metal whose surface is not oxidized. A pure interface which does not impede conduction of electrons of an oxide film etc., is formed on an interface between a superconducting layer and the normally conductive metal layer, which in turn is made much thinner than a coherent length as a featured length scale where a Cooper pair in a superconductor oozes into normally conductive metal through superconduction proximity effect. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009302219(A) 申请公布日期 2009.12.24
申请号 JP20080153715 申请日期 2008.06.12
申请人 NEC CORP;INSTITUTE OF PHYSICAL & CHEMICAL RESEARCH 发明人 NAKAMURA YASUNOBU
分类号 H01L39/06;H01L21/3205;H01L23/52;H01L39/22 主分类号 H01L39/06
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