| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing an electronic device which surely detects the deterioration of a material for forming an organic function layer without requiring much trouble and time. Ž<P>SOLUTION: When an organic EL device is manufactured, organic function layer test patterns 181t, 182t, 183t(R), 183t(G), 183t(B), and 184t are formed to be shifted to each other on a first large substrate 210. The test patterns 181t, 182t, 183t(R), 183t(G), 183t(B), and 184t are exposed to light of a single wavelength, and the defective or nondefective organic function film is determined based on the result of detection of PL light emitted from the test patterns 181t, 182t, 183t(R), 183t(G), 183t(B), and 184t. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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