发明名称 |
NEURALPROBE AND METHODS FOR MANUFACTURING SAME |
摘要 |
A neural probe and method of fabricating same are provided. The probe comprises a plurality of frames connected to each other and to a substrate by respective bimorphs. A probe base is connected by another bimorph to the frames. A probe tip extends from the probe base. The probe can achieve a large vertical motion and out-of-plane curling. The probe can operate according to three modes. The first mode pertains to a large-signal motion for tuning in single-unit neuronal activity. The second pertains to a small-signal motion with lock-in amplifier that increases SNR. The third pertains to burst small-signal motion for clearing tissue responses. Fabrication of a neural probe begins with a processed CMOS chip. Post-CMOS processing incorporates self-aligned selective nickel plating and sacrifices two aluminum layers. The fabrication technique produces a neural probe in which the sensing elements are in close proximity to CMOS circuitry. The fabrication technique obviates the need for post-CMOS masks, alignment, or assembly.
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申请公布号 |
US2009318824(A1) |
申请公布日期 |
2009.12.24 |
申请号 |
US20060915987 |
申请日期 |
2006.06.01 |
申请人 |
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION INC. |
发明人 |
NISHIDA TOSHIKAZU;XIE HUIKAI;PATRICK ERIN E.;SANCHEZ JUSTIN C. |
分类号 |
A61B5/0478;H01L21/465 |
主分类号 |
A61B5/0478 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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