发明名称 Isolation Trenches with Conductive Plates
摘要 Methods of forming isolation trenches, semiconductor devices, structures thereof, and methods of operating memory arrays are disclosed. In one embodiment, an isolation trench includes a recess disposed in a workpiece. A conductive material is disposed in a lower portion of the channel. An insulating material is disposed in an upper portion of the recess over the conductive material.
申请公布号 US2009315090(A1) 申请公布日期 2009.12.24
申请号 US20080144482 申请日期 2008.06.23
申请人 WEIS ROLF;HAPP THOMAS D 发明人 WEIS ROLF;HAPP THOMAS D.
分类号 H01L29/00;H01L21/20 主分类号 H01L29/00
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