| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring characteristics of an object to be measured with one interdigital electrode to find the characteristics of the object to be measured. SOLUTION: The apparatus 10 for measuring the characteristics of the object to be measured includes an elastic surface wave element 12: having the interdigital electrode 30 for exciting an elastic surface wave formed on a piezoelectric substrate 28; and a reaction field 34 formed between the interdigital electrode 30 and an end 32 of the piezoelectric substrate 28 with the object 26 to be measured loaded thereon. In the apparatus 10, a wall 35 is formed between the reaction field 34 and the interdigital electrode 30. The characteristics of the object 26 are found based on the surface wave which propagates from the interdigital electrode 30 through the reaction field 34, is reflected by the end 32, and is received by the interdigital electrode 30. Further, the wall 35 thus formed prevents the object 26 from being deposited on the interdigital electrode 30. Furthermore, a sealing structure for the interdigital electrode 30 is simplified. COPYRIGHT: (C)2010,JPO&INPIT |
