发明名称 Process to manufacture high-resolution liquid crystal display with rectangular laser beam directed at semiconductor film
摘要 <p>A rectangular impulse laser beam is directed at a semiconductor film (e.g. a-Si-film ) that is modified by heat action. Further claimed is a commensurate assembly.</p>
申请公布号 DE102008029622(A1) 申请公布日期 2009.12.24
申请号 DE20081029622 申请日期 2008.06.23
申请人 IHI CORPORATION 发明人 KAWAGUCHI, NORIHITO;KAWAKAMI, RYUSUKE;NISHIDA, KENICHIRO;MASAKI, MIYUKI;MORITA, MASARU;YOSHINOUCHI, ATSUSHI
分类号 H01L21/268;B23K26/06 主分类号 H01L21/268
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