LASER WORKING APPARATUS AND METHOD FOR CAPILLARY

摘要

PROBLEM TO BE SOLVED: To provide a capillary working apparatus and a working method using a femto-second laser.

SOLUTION: The laser working apparatus includes a femto-second laser device, a chuck having a rotating axis, and an optical system having a beam splitter and a reflecting mirror. A workpiece is installed on the rotating axis of the chuck. One laser beam of a femto-second is split into a plurality of beams by the optical system, the split individual femto-second laser beams is irradiated on the workpiece by the reflecting mirror and moved in a direction parallel to the rotating axis by rotating the chuck; thus, the laser working operation is performed by the apparatus.

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