MEMS Integrated Circuit Comprising Peristaltic Microfluidic Pump

摘要

A MEMS integrated circuit comprising a peristaltic microfluidic pump and control circuitry for the pump. The pump comprises a pumping chamber positioned between an inlet and an outlet; a plurality of moveable fingers positioned in a wall of the pumping chamber, the fingers being arranged in a row along the wall; and a plurality of thermal bend actuators. Each actuator is associated with a respective finger such that actuation of the thermal bend actuator causes movement of the respective finger into the pumping chamber. The control circuitry controls actuation of the plurality of actuators. The control circuitry is configured to provide a peristaltic pumping action in each pumping chamber via peristaltic movement of the fingers.