APPARATUS AND METHOD FOR MEASURING ELECTROMIGRATION

摘要

PURPOSE: An apparatus and a method for measuring electromigration are provided to increase the reliability of measurement by minimizing joule's heat in measuring an electromigration. CONSTITUTION: In a device, a test block(120) includes a plurality of specimens(DUT1~DUT20). The specimens are connected with each other in series. Bypass switch(BPSW1~BPSW20) are connected to specimens in parallel. The test block is connected to a pulse generator(124a). The first pulse generation switch(PGSW1) control connection between the test block and the pulse generators(on). The secondary pulse generation switch(PGSW2) controls connection between the test unit and the ground according to connection between of the pulse generator and the test unit. The pulse generator supplies signal to apply current of a pulse wave form to the specimens.