| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator, a droplet discharging head, methods of manufacturing them, and a droplet discharging device which improve the adhesiveness of a DLC film, are excellent in driving durability, and are capable of carrying out high-voltage drive. Ž<P>SOLUTION: The electrostatic actuator has an individual electrode 5 formed on a substrate, a diaphragm 6 disposed to be opposed to the individual electrode 5 via a predetermined gap, and a drive control circuit 40 which generates displacement in the diaphragm 6 by generating an electrostatic force between the individual electrode 5 and the diaphragm 6. An oxide-based insulating film 7 is formed on the diaphragm 6 or the individual electrode 5. An adhesion film 8 is formed on the oxide-based insulating film 7. A diamond-like carbon film 9 is formed further on the adhesion film 8. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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