,申请号JP20030155103-传众专利搜索

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发明名称
摘要
申请公布号	JP4389482(B2)	申请公布日期	2009.12.24
申请号	JP20030155103	申请日期	2003.05.30
申请人		发明人
分类号	H01L21/822;H01L27/095;G01J1/46;G02B26/00;H01L21/338;H01L27/04;H01L29/778;H01L29/812;H01L31/10;H01L31/101;H03B5/00;H03B5/18;H03C3/36;H03K3/36	主分类号	H01L21/822
代理机构		代理人
主权项
地址

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