| 摘要 |
<P>PROBLEM TO BE SOLVED: To further stabilize the state of plasma near a target surface. <P>SOLUTION: Disclosed is a magnetic field generating apparatus including a magnet assembly group including at least three magnetic assemblies arranged along a straight line, each of the magnet assemblies including a permanent magnet, split yokes which are formed by magnetic members and are placed to surround the outer surface of the permanent magnet, and nonmagnetic members located between the yokes. <P>COPYRIGHT: (C)2010,JPO&INPIT |
