| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an electrostatic actuator that can be efficiently driven. Ž<P>SOLUTION: An electrostatic optical scanner 100 (electrostatic actuator) is essentially composed of a disk-shaped first movable part 200, an annular second movable part 300 surrounding the first movable part 200, and an annular frame 400 surrounding the second movable part 300. First supporting parts 501, 502 are installed that connect the notches 311, 312 on the outer circumference 202 of the first movable part 200 and on the inner periphery of the second movable part 300, respectively. The first supporting parts 501, 502 have shapes in each of which a planar member of a rectangular parallelepiped is folded in multiple layers in the width direction, and have elasticity in the twisting direction while supporting the first movable part 200 in a rockable manner relative to the second movable part 300 with the first supporting parts 501, 502 as axes. An X-direction electrode 700 is composed of two near half circles 701, 702 which can be obtained by dividing the disk in two on the diameter. A Y-direction electrode 800 is composed of two near half rings which can be obtained by dividing the annular shape in two on the diameter with the X-direction electrode 700 housed in the inner periphery. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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