| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure measuring device excellent in maintainability by change with time, producible inexpensively, and capable of accurately detecting a pressure in a wide pressure range from a normal pressure to high vacuum. SOLUTION: A voltage value V (output) corresponding to a gas pressure output from a Pirani vacuum gage is input into an operation part 4 through a driver 2. In the operation part 4, when the input voltage value is lower than a threshold on reference to the threshold set beforehand, a pressure is calculated by using a mathematical expression 3 stored in a memory 7. When the input voltage value is higher than the threshold, the pressure is calculated by using a mathematical expression 4 stored in the memory 7. COPYRIGHT: (C)2010,JPO&INPIT
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