| 摘要 |
PROBLEM TO BE SOLVED: To provide a test piece temperature control method stably controlling a temperature of a test piece to a desired temperature by estimating a test piece temperature accurately. SOLUTION: The test piece temperature control method is a method for controlling a temperature of a test piece placed on a test piece stage, the test piece stage being provided to place the test piece in a plasma processing chamber, and including a refrigerant flow path to cool the test piece stage, a heater to heat the test piece stage, and a temperature sensor to measure the temperature of the test piece stage. The method includes the steps of: measuring in advance variations-with-time of supply electric power to the heater, a temperature of the test piece, and a temperature of the temperature sensor, without plasma processing; approximating a relation among the measured values using a simultaneous linear differential equation, estimating a test piece temperature from the variations-with-time of the sensor temperature y1, the heater electric power u1, and the plasma heat input by means of the Luenberger's states observer based on the simultaneous linear differential equation used for the approximation; and performing a feedback control of the test piece temperature using the estimated test piece temperature. COPYRIGHT: (C)2010,JPO&INPIT
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