| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transfer apparatus having the capability of enhancing stability under high-temperature and high-vacuum environments, and to provide an organic deposition device with the same. Ž<P>SOLUTION: The organic deposition device includes: a vacuum chamber; a stage installed in the vacuum chamber and having a substrate seated thereon; a deposition source for evaporating an organic toward the substrate; a process utility line coupled to the deposition source and drawn out to the exterior of the vacuum chamber; and a transfer apparatus for moving the deposition source in a direction parallel to a direction of the substrate, and having the process utility line installed therein. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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