METHOD FOR FORMING CHIP OF CARBON NANOTUBE-BASED MATERIAL

摘要

<P>PROBLEM TO BE SOLVED: To provide a technique for lowering the contact resistance of a CNT(carbon nanotube)-based material with another electric conductor or ensuring high reliability when the CNT-based material is in contact with another electric conductor. Ž<P>SOLUTION: The method for forming the chip of the CNT-based material includes the steps of: disposing/projecting the chip of the CNT-based material in a space above a concave place; and irradiating the chip thereof with active energy rays while coming into contact with a gaseous substance, which is an oxidizing substance or generates the oxidizing substance, with the projected chip. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž