| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating gyro element, a support structure of the vibrating gyro element, and a gyro sensor for suppressing the driving vibration leaked to a base portion, and preventing an error in the detection of an angular velocity. <P>SOLUTION: The vibrating gyro element includes in the same plane the base portion 10; a pair of vibrating arms 11a and 11b for detection extended out of the base portion 10 on both sides in a straight line shape; a pair of connecting arms 13a and 13b extended out from the base portion 10 onto both sides in directions perpendicular to the vibrating arms 11a and 11b for detection; a pair of vibrating arms 14a, 14b, 15a and 15b for driving each extended out from the tip portion of each of the connecting arms 13a and 13b to both sides perpendicularly to the tip portion; four beams 20a, 20b, 21a and 21b extended out of the base portion 10; and each of support portions 22a, 22b, 23a and 23b connected to the tip of each of the beams 20a, 20b, 21a and 21b, wherein each of the beams 20a, 20b, 21a and 21b is once extended out of the base portion 10 in a direction approximately perpendicular to the extending-out direction of each of the vibrating arms 14a, 14b, 15a and 15b for driving. <P>COPYRIGHT: (C)2010,JPO&INPIT |
