| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storing container for suppressing deformation of the container body caused by deflection of a ceiling plate and preventing deterioration in sealing property and generation of particle. SOLUTION: The substrate storing container includes: a container body 1 for storing semiconductor wafers; and a top flange 19 for transfer mounted to the container body 1 and held by a ceiling transfer mechanism in a factory. The container body 1 is formed of a ceiling plate 16 facing to a bottom plate via storing space for semiconductor wafers, a rear surface wall 24 for vertically coupling between the rear portions of the bottom plate and the ceiling plate 16, and a pair of sidewalls 26 for vertically coupling both side portions of the bottom plate and the ceiling plate 16. The forward front surface part 28 of this container body 1 is formed as an opening portion. A plurality of threaded bosses 3B or the like as the loading portions of the top flange 19 are located in the vicinity of ridgelines less likely to deflect between the ceiling plate 16 of the container body 1 and each sidewall 26. COPYRIGHT: (C)2010,JPO&INPIT |
