| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus wherein even an operator unfamiliar with communication specification for host computers can conduct a communication test to monitor transmission/reception messages in real time and easily specify the cause of an error when the error occurs. Ž<P>SOLUTION: When an message analysis means 3a acquires main data and a data division from a transmission/reception message and detects an error message, a name solution means 3e derives a message name and an event name from the main data and the data division. Furthermore, a data format analysis means 3f compares the data division with a predetermined data format, and a display means 3c focally displays the error data and indicates contents of the error. Then, a condition setting means 3b sets a condition for temporarily stopping message display, and a condition for message display or non-display. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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