发明名称 METHOD OF CORRECTING END SURFACE OF FLANGE
摘要 <P>PROBLEM TO BE SOLVED: To increase working efficiency without replacing a workpiece holding means for holding a flange end surface correction tool when the end surface is corrected. <P>SOLUTION: When the end surface of the flange 36 is corrected using the flange end surface correction tool 50 having a grinding wheel 51, a fixing section 52 for fixing the grinding wheel 51, and a base section 53 for supporting the fixing section 52, the base section 53 of the flange end surface correction tool 50 is held on a holding means 10 having a holding surface 11 for holding a workpiece by a negative pressure in the area which has an area exceeding the area of the holding surface 11 and which is held by at least the base section 53 and the holding surface 11 with an end surface correction sheet 60 having through-holes 61 interposed therebetween. Consequently, the flange end surface correction tool 50 can be held on the holding means 10 by a negative pressure irrespective of the size of the holding surface 11. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009297855(A) 申请公布日期 2009.12.24
申请号 JP20080156840 申请日期 2008.06.16
申请人 DISCO ABRASIVE SYST LTD 发明人 NISHIMOTO TAKAO
分类号 B24B7/16;H01L21/301 主分类号 B24B7/16
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