| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure method, by which the line width of a color layer after cured can be made constant to achieve good linearity. <P>SOLUTION: One of a red resist layer 15a, a blue resist layer 16a and a green resist layer 17a is formed on a transparent substrate 11. The transparent substrate 11 is placed on a surface plate 21; and a laser beam L having a single wavelength is made to irradiate the color resist layers 15a, 16a, 17a. The transmittance of the color resist layers 15a, 16a, 17a with respect to the laser beam L of the above wavelength ranges from 2% to 14%. Thus, the luminous energy of the laser beam L transmitting through the color resist layers 15a, 16a, 17a to reach the transparent substrate 11 is regulated, the line width of the color layers 15, 16, 17 after cured is made constant. <P>COPYRIGHT: (C)2010,JPO&INPIT |
