| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing apparatus where a plurality of laser beams with thin and long shape in the cross-sectional face can be simultaneously produced from one laser beam in a simple constitution, and its production cost is reduced. <P>SOLUTION: The laser processing apparatus includes: a stage 1 reciprocately carrying a rectangular substrate 5; a laser head 2 provided so as to be confronted with the upper face of the stage 1 and provided with a plurality of cylindrical lenses 18 producing a plurality of laser beams with thin and long shape in the cross-sectional face from laser beam radiated from a laser light source 14 and emitting them to a substrate 5; first and second imaging means 3A, 3B arranged so as to image the positions on this side in the carrying direction of the laser beam emission positions by the plurality of cylindrical lenses 18; and a control means 4 controlling the emission timing of the laser beam radiated from the laser light source 14 and the emission positions of the laser beams based on the images by the first and second imaging means 3A, 3B. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
