| 摘要 |
PROBLEM TO BE SOLVED: To provide an appropriate casing shape of a heat treatment apparatus having a flash lamp and a halogen lamp. SOLUTION: A chamber side part 51 forming the side of a chamber 5 includes a halogen lamp corresponding part 51a molded in a cylindrical shape, and a flash lamp corresponding part 51b arranged on the upper side of the halogen lamp corresponding part 51a and molded in a rectangular cylindrical shape. The diameter R3 of the cross section 510a of the halogen lamp corresponding part 51a is set to be smaller than the short side of the rectangle of the cross section 510b of the flash lamp corresponding part 51b. Also, a plurality of flash lamps 41 are arranged such that the longitudinal direction is along the long side R1 of the cross section 510b. Thus, the chamber 5 in a shape corresponding to the characteristics of both of the halogen lamp 31 and the flash lamp 41 is obtained. COPYRIGHT: (C)2010,JPO&INPIT |
