| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a filtration dewatering method of a metal polishing liquid and its apparatus which effectively filtration dewater a metal polishing raw liquid containing a particle solid content such as a silicone wafer without using any coagulant such as a coagulant and can reuse its solid content as a silicone from a dewarered cake. <P>SOLUTION: The metal polishing raw liquid containing the particle solid content is frozen by a freezer (4), is melted by a thawing machine (8), then is supplied to a solid-liquid separator (14) to be separated into the dewatered cake and a filtered liquid, and the dewatered cake is discharged outside. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
