APPARATUS FOR DRIVING LIFT PIN FOR VACUUM PROCESSING APPARATUS AND CONTROL METHOD FOR THE SAME

摘要

PURPOSE: An apparatus for a driving lift pin for vacuum processing apparatus and a control method for the same are provided to detect the state of a substrate according to a pressurization state of a lift pin by installing a pressure device applying elastic force to the lift pin and the detector. CONSTITUTION: In a device, a plurality of lift pins(30) are installed the substrate support so that they are ascended. A driving part(40) raises lift pins. A pressure unit(50) is installed between parts of the lift pins and the driving part. The pressure unit applies elastic force at least part of lift pins. A connection part(45) interlinks the driving part and the lift pin. The pressure unit is installed between the lift pin and the connection unit or the driving unit and the connection unit. The pressure unit is formed with a coil spring or a leaf spring.