| 摘要 |
<p>PURPOSE: A transfer apparatus and an organic deposition device with the same are provided to minimize malfunctions due to a wiring and a pipe inside a vacuum chamber by establishing the wiring and pipe connected to an evaporation source. CONSTITUTION: In a device, a vacuum chamber(10) has a predetermined internal space. The vacuum chamber is connected to the vacuum exhausting system through an exhaust pipe(14a). The stage(12) is installed on the vacuum chamber, and the substrate(14) is mounted in the single-side of the stage. An evaporation source(20) includes a nozzle(21) injecting a heating source and an evaporated material on the substrate. The materials flown out from the nozzle of the evaporation source are evaporated on a desired region of the substrate through the mask(22). A process oil line(40) includes a wiring and a pipe. The process oil line is connected to the evaporation source. The process oil line is drawn to the outside of the vacuum chamber. The transfer apparatus(30) transfers the evaporation source in parallel with substrate.</p> |
