A BOARD HAVING LAYER FOR PREVENTING HUMIDITY FROM PERCOLATION INCLUSIVE OF METAL THIN FILM AND SILICONE COMPOUNDS AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A humidity preventing film is provided to improve the productivity by forming transparent oxide thin film and silicon based compound in the same chamber. CONSTITUTION: In a device, a substrate(100) includes a transmission of humidity preventing film(140) formed on a transparency base material(120) and a base material consisting of Polymer. The base material is comprised of a polymer substrate for the ductility display device including the PC, PET, PES, PEN, RAR. The transmission of humidity preventing film is located on the base material. The transmission of humidity preventing film includes the transparent oxide thin film(142) and the silicon based compound(144). The transparent oxide thin film is evaporated through PVD on the base material. The silicon based compound is formed through the plasma polymerization method on the transparent oxide thin film.