| 摘要 |
Provided is a laser working apparatus comprising a homogenizing means (2) for substantially homogenizing the output distribution of a laser beam (L) emitted from a laser oscillator (1), a focusing optical system (3) for focusing the image of the laser beam (L) having the output distribution substantially homogenized by the homogenizing means (2), and a masking means (4), arranged near the position at which the image of the laser beam (L) is focused by the focusing optical system (3), for cutting off and shaping the laser beam (L) into a shape to irradiate a workpiece (7). The laser beam (L) emitted by the laser oscillator (1) has intrinsically an output distribution close to a Gaussian distribution, but the laser beam (L) is passed through the masking means (4) after once homogenized by the homogenizing means (2), so that the heterogeneousness of the intrinsic laser beam (L) is not involved into the output distribution of the laser beam (L) to irradiate the workpiece (7). As a result, an improvement in quality of working is realized. |
