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发明名称
Improvements in and relating to methods of etching silicon
摘要
申请公布号
GB819074(A)
申请公布日期
1959.08.26
申请号
GB19560001250
申请日期
1956.04.24
申请人
THE MULLARD RADIO VALVE COMPANY LIMITED
发明人
SPRAY CHARLES ALAN FRANCIS THOMAS
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
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