PERMEABLE DIAPHRAGM PIEZORESISTIVE BASED SENSORS

摘要

An improved piezoresistive-based sensor (78) can include a cavity (66) in a substantially solid substrate (68). A reactive agent can optionally be present in the cavity (66). A flexible machined membrane can form a wall of the cavity (66). The flexible machined membrane can include an array of channels (76) configured to permit selective passage of a target material into and out of the cavity. Additionally, the flexible machined membrane can include a piezoresistive features (74) associated with the membrane. The reactive agent included in the cavity (66) can be volumetrically responsive to the presence of the target material or fluid. These sensors can be configured as pressure sensors, chemical sensors, flow sensors, and the like.