| 摘要 |
A sheet measurement apparatus has a sheet disposed in a melt. The measurement system uses a beam to determine a dimension of the sheet. This dimension may be, for example, height or width. The beam may be, for example, collimated light, a laser, x-rays, or gamma rays. The production of the sheet may be altered based on the measurements. |
| 申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;ROWLAND, CHRISTOPHER, A.;KELLERMAN, PETER, L.;SINCLAIR, FRANK;BLAKE, JULIAN, G.;BATEMAN, NICHOLAS, P.T. |
发明人 |
ROWLAND, CHRISTOPHER, A.;KELLERMAN, PETER, L.;SINCLAIR, FRANK;BLAKE, JULIAN, G.;BATEMAN, NICHOLAS, P.T. |
