| 摘要 |
PURPOSE:To obtain a useful information concerning the radiation quality by arranging ranges of radiation detecting elements, each of which is formed by providing opposing electrodes to a semiconductor substrate having a sensitivity to the radiation in the incident direction of the radiation, and analyzing the distribution of the output signals from respective detecting element regions. CONSTITUTION:Electrodes 2 (21, 22...) are arranged on one surface of a semiconductor substrate 1 having a sensitivity to a radiation, and electrodes 3 (31, 32...) opposing respectively to electrodes 2 (21, 22...) are arranged on the other surface thereof. Regions held between the above described electrodes and unit X-ray detecting regions, and they are arranged in series with respect to incident X-rays. As incident radiations such as X-rays generate in the substrate 1 electron hole pairs by photo-electric effect or Compton effect, they are attenuated, and these electron hole pairs are collected by electrodes nearest to the generated points.
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