发明名称 |
EDGE SURFACE OBSERVATION APPARATUS |
摘要 |
<p>Provided is a captured image encompassing a wide range of an edge surface of an observation target even when the edge surface is a highly glossy chamfered edge surface. An apparatus comprises a light diffusion member (11) which is provided with a light diffusing plate for transmitting light and diffusing the transmitted light formed into a bent shape or a curved shape opposite the inner surface for the range extending from the edge surface of an observation target (1) to the surfaces on both the front and back sides connected to that edge surface, and a viewing window (14) which makes it possible to see the edge surface (1a) of the observation target from the position of a camera (30) placed on the outside of the diffusing plate; a plurality of LEDs (12) which are arranged on the outer side of the light diffusion member (11) and illuminate the edge surface (1a) through the light diffusion member (11); LED (21) and lens (22) which irradiate light in the direction intersecting the direction of the optical axis of the camera (30) which faces the viewing window (14); and a half mirror (23) which reflects light from LED (21) between the camera (30) and the viewing window (14), and irradiates the edge surface (1a) through the viewing window (14), and transmits the light reflected from the edge surface (1a) to the camera (30) side.</p> |
申请公布号 |
WO2009154182(A1) |
申请公布日期 |
2009.12.23 |
申请号 |
WO2009JP60898 |
申请日期 |
2009.06.15 |
申请人 |
KOBELCO RESEARCH INSTITUTE, INC.;AKAMATSU MASARU;IBA KUNIO;HASHIZUME HIDEHISA;NAKAI YASUHIDE |
发明人 |
AKAMATSU MASARU;IBA KUNIO;HASHIZUME HIDEHISA;NAKAI YASUHIDE |
分类号 |
G01N21/956;H01L21/66 |
主分类号 |
G01N21/956 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|