| 摘要 |
PURPOSE:To make a loss of a ultrasonic wave output to a value close to zero, by providing the 1st electrode, ZnO thin film and 2nd electrode at the upper surface of the support base made of quartz glass and forming a convex lens at another end of the support base. CONSTITUTION:At the side of flat from of the electrode support base 1 made of quartz glass, a lower electrode 8 made of Al vapor deposition film is formed. The size of this electrode 8 is the same as the width of the convex lens 2 formed on another end of the support base 1, and the size can easily be decided with mask setting in, photo etching technology. The ZnO thin film 4 is formed widely than the lower electrode 8 and the concave lens 2 so that it can cover the lower electrode 8. On the upper side of this thin film 4, the upper electrode 9 made of the same material as the lower electrode 8 is formed. Further, the forming area of the upper electrode 9 is made greater than the lower electrode 8. Thus, since the convex lens 2 is formed at one electrode and the size is highly matched to, the output loss is zeroed in case of ultrasonic wave oscillation. |
