发明名称 |
METHODS OF FORMING AN EMBEDDED CAVITY FOR SENSORS |
摘要 |
<p>A method of forming a sensor with an embedded cavity can include forming at least one cavity (50) in a substrate (52). The cavity (50) can include at least one membrane wall (54) having a plurality of holes (64) in the membrane wall (54), the plurality of holes (64) being formed in a two-dimensional array. A piezoresistive system (58) can be mechanically associated with the membrane wall (54). The method can be a front-side or back-side process for forming the cavity (50). The membrane (54) simultaneously acts as a diaphragm and a fluid passage into the cavity (50). Such sensors can be suitable as pressure sensors, chemical sensors, flow sensors and the like.</p> |
申请公布号 |
WO2009114818(A3) |
申请公布日期 |
2009.12.23 |
申请号 |
WO2009US37179 |
申请日期 |
2009.03.13 |
申请人 |
UNIVERSITY OF UTAH RESEARCH FOUNDATION;SOLZBACHER, FLORIAN;ORTHNER, MICHAEL |
发明人 |
SOLZBACHER, FLORIAN;ORTHNER, MICHAEL |
分类号 |
G01L9/00;G01L7/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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