发明名称 |
SYSTEM AND METHOD FOR DELIVERING VAPOR |
摘要 |
A system and method for providing a vapor are described. In one variation, liquid is placed in a containment vessel, and a pressure in the containment vessel is reduced below atmospheric pressure. The pressure in the vessel is monitored and the liquid is heated in response to the sensed pressure falling below a desired level. When needed, the vapor is delivered from the liquid containment vessel to the external system. |
申请公布号 |
EP1993713(A4) |
申请公布日期 |
2009.12.23 |
申请号 |
EP20070852354 |
申请日期 |
2007.02.16 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
TOMASEL, FERNANDO GUSTAVO;MAUCK, JUSTIN;GONZALEZ, JUAN JOSE |
分类号 |
F02M9/127 |
主分类号 |
F02M9/127 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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