HIGH VOLTAGE GAN-BASED HETEROJUNCTION TRANSISTOR STRUCTURE AND METHOD OF FORMING SAME

摘要

A semiconductor device includes a substrate, a first active layer disposed over the substrate, and a second active layer disposed on the first active layer. The second active layer has a higher bandgap than the first active layer such that a two-dimensional electron gas layer arises between the first active layer and the second active layer. A flash layer is disposed on the second active layer and source, gate and drain contacts are disposed on the flash layer.