发明名称 PRESSURE MEASUREMENT USING A MEMS DEVICE
摘要 <p>A device to measure pressure is disclosed. In one embodiment, the device comprises at least one element comprising two layers (24, 26) separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers and a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device.</p>
申请公布号 WO2009155298(A1) 申请公布日期 2009.12.23
申请号 WO2009US47552 申请日期 2009.06.16
申请人 QUALCOMM MEMS TECHNOLOGIES, INC.;KHAZENI, KASRA 发明人 KHAZENI, KASRA
分类号 G01L9/00 主分类号 G01L9/00
代理机构 代理人
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