Cleaning apparatus and cleaning method

摘要

A cleaning apparatus (1) for cleaning an object (4) to be cleaned by allowing a cleaning medium (5) caused to fly by an air flow to collide with the object to be cleaned is provided. The cleaning apparatus (1) includes a cleaning tank (2) in which the cleaning medium (5) is caused to fly by the air flow and which has an opening to allow the object (4) to be cleaned to pass through; a cleaning medium accelerating part (7) provided at a bottom part of the cleaning tank (2) and to inject the air flow to cause the cleaning medium (5) to fly; a hollow elongated member (11a) having substantially the same inner diameter as a diameter of the opening, connected outside the opening, and configured to form a movement path for the object (4) to be cleaned; and a cleaning medium returning part to return the cleaning medium (5) stagnant in the hollow elongated member (11a) into the cleaning tank.