发明名称 LASER MICROMACHINING USING PROGRAMMABLE PULSE SHAPES
摘要 <p>Laser pulse shaping techniques produce tailored laser pulse spectral output (64, 66). The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns 20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators (250, 254) receiving drive signals that selectively change the amount of incident pulsed laser emission (106, 112, 114) to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build up time.</p>
申请公布号 WO2009120918(A3) 申请公布日期 2009.12.23
申请号 WO2009US38489 申请日期 2009.03.27
申请人 ELECTRO SCIENTIFIC INDUSTRIES, INC.;PENG, XIAOYUAN;BAIRD, BRIAN, W.;JORDENS, WILLIAM, J.;HEMENWAY, DAVID, MARTIN 发明人 PENG, XIAOYUAN;BAIRD, BRIAN, W.;JORDENS, WILLIAM, J.;HEMENWAY, DAVID, MARTIN
分类号 H01S3/10;H01S3/00 主分类号 H01S3/10
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