发明名称 |
GAS GAUGE COMPATIBLE WITH VACUUM ENVIRONMENTS |
摘要 |
<p>In one embodiment of the present invention, there is provided a gas gauge for use in a vacuum environment having a measurement gas flow channel. The gas gauge may comprise a measurement nozzle in the measurement gas flow channel. The measurement nozzle may be configured to operate at a sonically choked flow condition of a volumetric flow being sourced from a gas supply coupled to the measurement gas flow channel. The gas gauge may further comprise a pressure sensor operatively coupled to the measurement gas flow channel downstream from the sonically choked flow condition of the volumetric flow to measure a differential pressure of the volumetric flow for providing an indication of a gap between a distal end of the measurement nozzle and a target surface proximal thereto.</p> |
申请公布号 |
WO2009103485(A8) |
申请公布日期 |
2009.12.23 |
申请号 |
WO2009EP01101 |
申请日期 |
2009.02.17 |
申请人 |
ASML HOLDING N.V.;SCHULTZ, GEOFFREY, ALAN |
发明人 |
SCHULTZ, GEOFFREY, ALAN |
分类号 |
G01B13/12;G03F7/20 |
主分类号 |
G01B13/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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