| 摘要 |
An optical system forming an image of a pattern provided in an object plane of the optical system in an image plane of the optical system, comprises: a plurality of non-parallel optical axis segments; a plurality of intermediate images; and a plurality of mirrors. Radiation emerging from an intermediate image is incident in this order on a first mirror positioned optically remote from a pupil position, a second mirror positioned optically near to a pupil position to form a pupil mirror, and a third mirror positioned optically remote from a pupil position, prior to forming another intermediate image, wherein the first mirror a first concave mirror, and the third mirror is a second concave mirror.
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