<p>Cross-section systems and methods are disclosed. Methods can include imaging a cross-section of a first sample, and simultaneously preparing a cross-section of a second sample so that the cross-section of the second sample can be imaged. The first and second samples can be, for example, first and second semiconductor articles, respectively.</p>
申请公布号
WO2009155272(A2)
申请公布日期
2009.12.23
申请号
WO2009US47474
申请日期
2009.06.16
申请人
CARL ZEISS SMT. INC.;SCIPIONI, LAWRENCE;KNIPPELMEYER, RAINER;RIEDESEL, CHRISTOPH;MORGAN, JOHN;MANTZ, ULRICH;WAGEMANN, ULRICH
