| 摘要 |
<p>A processing device is provided with a holding section (1) for holding a body to be processed, a rotationally driving section (60) for rotating the body (W) to be processed held by the holding section (1), a first cleaning mechanism (30) making contact with one surface of a peripheral edge section of the body (W) to be processed and cleaning said surface, and a second cleaning mechanism (40) making contact with the other surface of the peripheral edge section of the body (W) to be processed and cleaning the other surface. The processing device also has a first adjusting mechanism (10) for adjusting pressing force applied from the first cleaning mechanism (30) to said surface of the peripheral edge section, and second adjusting mechanisms (21, 25) for adjusting pressing force applied from the second cleaning mechanism (40) to the other surface of the peripheral edge section.</p> |
